relation: https://khub.utp.edu.my/scholars/2554/
title: Design and simulation of mass-sensitive gas sensor based on CMOS-MEMS resonator
creator: Ahmed, A.Y.
creator: Dennis, J.O.
creator: Md. Khir, M.H.
creator: Mohamad Saad, M.N.
description: This paper is mainly focused on the design and simulation of a micromachined CMOS-MEMS resonator for gas sensing applications. The principle of detection of the gaseous species is based on the change in resonant frequency of the microresonator as a result of the adsorption of an analyte molecule onto the surface of the active material deposited on the microresonator resulting into a change of the mass of the microresonator device. Coventor Ware simulation software is used to design and simulate the micromachined microresonator gas sensing platforms. Simulation results show a resonant frequency of 20162.3 Hz for the resonator. © 2012 American Institute of Physics.
date: 2012
type: Conference or Workshop Item
type: PeerReviewed
identifier:   Ahmed, A.Y. and Dennis, J.O. and Md. Khir, M.H. and Mohamad Saad, M.N.  (2012) Design and simulation of mass-sensitive gas sensor based on CMOS-MEMS resonator.  In: UNSPECIFIED.     
relation: https://www.scopus.com/inward/record.uri?eid=2-s2.0-84874160816&doi=10.1063%2f1.4757556&partnerID=40&md5=c21b2fcb9c4cfc1d9a577a365292ecd6
relation: 10.1063/1.4757556
identifier: 10.1063/1.4757556