?url_ver=Z39.88-2004&rft_id=10.1063%2F1.4757556&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Abook&rft.au=Ahmed%2C+A.Y.&rft.aulast=Ahmed&rft.aufirst=A.Y.&rft.issn=0094243X&rft.isbn=9780735410947&rft.title=Design+and+simulation+of+mass-sensitive+gas+sensor+based+on+CMOS-MEMS+resonator&rft.date=2012&rft.genre=proceeding