@inproceedings{scholars2554,
           pages = {673--676},
         journal = {AIP Conference Proceedings},
            year = {2012},
         address = {Kuala Lumpur},
           title = {Design and simulation of mass-sensitive gas sensor based on CMOS-MEMS resonator},
             doi = {10.1063/1.4757556},
            note = {cited By 3; Conference of 2nd International Conference on Fundamental and Applied Sciences 2012, ICFAS 2012 ; Conference Date: 12 June 2012 Through 14 June 2012},
          volume = {1482},
          author = {Ahmed, A. Y. and Dennis, J. O. and Md. Khir, M. H. and Mohamad Saad, M. N.},
            issn = {0094243X},
            isbn = {9780735410947},
             url = {https://www.scopus.com/inward/record.uri?eid=2-s2.0-84874160816&doi=10.1063\%2f1.4757556&partnerID=40&md5=c21b2fcb9c4cfc1d9a577a365292ecd6},
        abstract = {This paper is mainly focused on the design and simulation of a micromachined CMOS-MEMS resonator for gas sensing applications. The principle of detection of the gaseous species is based on the change in resonant frequency of the microresonator as a result of the adsorption of an analyte molecule onto the surface of the active material deposited on the microresonator resulting into a change of the mass of the microresonator device. Coventor Ware simulation software is used to design and simulate the micromachined microresonator gas sensing platforms. Simulation results show a resonant frequency of 20162.3 Hz for the resonator. {\^A}{\copyright} 2012 American Institute of Physics.}
}