eprintid: 2438
rev_number: 2
eprint_status: archive
userid: 1
dir: disk0/00/00/24/38
datestamp: 2023-11-09 15:50:40
lastmod: 2023-11-09 15:50:40
status_changed: 2023-11-09 15:43:32
type: article
metadata_visibility: show
creators_name: Ahmed, A.Y.
creators_name: Dennis, J.O.
creators_name: Md Khir, M.H.
creators_name: Mohamad Saad, M.N.
creators_name: Buyong, M.R.
title: Design, simulation and fabrication of a mass sensitive CMOS-MEMS resonator
ispublished: pub
keywords: Active material; Analyte molecules; CMOS-MEMS; Deep Reactive Ion Etching; Mass sensitivity; Micro resonators; Micromachined resonators; Simulation software, Computer software; Design; Microelectromechanical devices; Natural frequencies, Resonators
note: cited By 3
abstract: The design, simulation and fabrication of a mass-sensitive CMOS-MEMS resonator are presented in this paper. The principle of detection of the gaseous species is based on the change in resonant frequency of the microresonator as a result of the absorption/adsorption of an analyte molecule onto the surface of the active material deposited on the microresonator resulting into a change of the mass of the microresonator device. CoventorWare simulation software is used to design and simulate the micromachined resonator gas sensing platform/membrane. From simulation, the resonant frequency of the resonator is found to be 6.45 kHz and 23 kHz for mode 1 and mode 2 (in y and z direction), respectively. The frequency decreases with increasing mass added on top of the CMOS-MEMS resonator membrane and the mass sensitivity of the resonator determined to be 0.18 Hz/pg. © 2012 IFSA.
date: 2012
official_url: https://www.scopus.com/inward/record.uri?eid=2-s2.0-84879747002&partnerID=40&md5=2c2a875bb83f6de1fa77cb6351c6c64a
full_text_status: none
publication: Sensors and Transducers
volume: 17
number: SPL 12
pagerange: 40-49
refereed: TRUE
issn: 17265479
citation:   Ahmed, A.Y. and Dennis, J.O. and Md Khir, M.H. and Mohamad Saad, M.N. and Buyong, M.R.  (2012) Design, simulation and fabrication of a mass sensitive CMOS-MEMS resonator.  Sensors and Transducers, 17 (SPL 12).  pp. 40-49.  ISSN 17265479