TY  - JOUR
VL  - 17
SP  - 40
A1  - Ahmed, A.Y.
A1  - Dennis, J.O.
A1  - Md Khir, M.H.
A1  - Mohamad Saad, M.N.
A1  - Buyong, M.R.
KW  - Active material; Analyte molecules; CMOS-MEMS; Deep Reactive Ion Etching; Mass sensitivity; Micro resonators; Micromachined resonators; Simulation software
KW  -  Computer software; Design; Microelectromechanical devices; Natural frequencies
KW  -  Resonators
Y1  - 2012///
AV  - none
ID  - scholars2438
N2  - The design, simulation and fabrication of a mass-sensitive CMOS-MEMS resonator are presented in this paper. The principle of detection of the gaseous species is based on the change in resonant frequency of the microresonator as a result of the absorption/adsorption of an analyte molecule onto the surface of the active material deposited on the microresonator resulting into a change of the mass of the microresonator device. CoventorWare simulation software is used to design and simulate the micromachined resonator gas sensing platform/membrane. From simulation, the resonant frequency of the resonator is found to be 6.45 kHz and 23 kHz for mode 1 and mode 2 (in y and z direction), respectively. The frequency decreases with increasing mass added on top of the CMOS-MEMS resonator membrane and the mass sensitivity of the resonator determined to be 0.18 Hz/pg. © 2012 IFSA.
EP  - 49
UR  - https://www.scopus.com/inward/record.uri?eid=2-s2.0-84879747002&partnerID=40&md5=2c2a875bb83f6de1fa77cb6351c6c64a
SN  - 17265479
JF  - Sensors and Transducers
IS  - SPL 12
TI  - Design, simulation and fabrication of a mass sensitive CMOS-MEMS resonator
N1  - cited By 3
ER  -