<> "The repository administrator has not yet configured an RDF license."^^ . <> . . . "Design, simulation and fabrication of a mass sensitive CMOS-MEMS resonator"^^ . "The design, simulation and fabrication of a mass-sensitive CMOS-MEMS resonator are presented in this paper. The principle of detection of the gaseous species is based on the change in resonant frequency of the microresonator as a result of the absorption/adsorption of an analyte molecule onto the surface of the active material deposited on the microresonator resulting into a change of the mass of the microresonator device. CoventorWare simulation software is used to design and simulate the micromachined resonator gas sensing platform/membrane. From simulation, the resonant frequency of the resonator is found to be 6.45 kHz and 23 kHz for mode 1 and mode 2 (in y and z direction), respectively. The frequency decreases with increasing mass added on top of the CMOS-MEMS resonator membrane and the mass sensitivity of the resonator determined to be 0.18 Hz/pg. © 2012 IFSA."^^ . "2012" . "17" . "SPL 12" . . "Sensors and Transducers"^^ . . . "17265479" . . . . . . . . . . . . . . . . . . . "M.H."^^ . "Md Khir"^^ . "M.H. Md Khir"^^ . . "J.O."^^ . "Dennis"^^ . "J.O. Dennis"^^ . . "M.N."^^ . "Mohamad Saad"^^ . "M.N. Mohamad Saad"^^ . . "A.Y."^^ . "Ahmed"^^ . "A.Y. Ahmed"^^ . . "M.R."^^ . "Buyong"^^ . "M.R. Buyong"^^ . . . . . "HTML Summary of #2438 \n\nDesign, simulation and fabrication of a mass sensitive CMOS-MEMS resonator\n\n" . "text/html" . .