?url_ver=Z39.88-2004&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.au=Ahmed%2C+A.Y.&rft.aulast=Ahmed&rft.aufirst=A.Y.&rft.issue=SPL+12&rft.volume=17&rft.issn=17265479&rft.atitle=Design%2C+simulation+and+fabrication+of+a+mass+sensitive+CMOS-MEMS+resonator&rft.pages=40-49&rft.title=Sensors+and+Transducers&rft.date=2012&rft.genre=article