@article{scholars2438,
          number = {SPL 12},
          volume = {17},
            note = {cited By 3},
            year = {2012},
         journal = {Sensors and Transducers},
           title = {Design, simulation and fabrication of a mass sensitive CMOS-MEMS resonator},
           pages = {40--49},
        keywords = {Active material; Analyte molecules; CMOS-MEMS; Deep Reactive Ion Etching; Mass sensitivity; Micro resonators; Micromachined resonators; Simulation software, Computer software; Design; Microelectromechanical devices; Natural frequencies, Resonators},
             url = {https://www.scopus.com/inward/record.uri?eid=2-s2.0-84879747002&partnerID=40&md5=2c2a875bb83f6de1fa77cb6351c6c64a},
        abstract = {The design, simulation and fabrication of a mass-sensitive CMOS-MEMS resonator are presented in this paper. The principle of detection of the gaseous species is based on the change in resonant frequency of the microresonator as a result of the absorption/adsorption of an analyte molecule onto the surface of the active material deposited on the microresonator resulting into a change of the mass of the microresonator device. CoventorWare simulation software is used to design and simulate the micromachined resonator gas sensing platform/membrane. From simulation, the resonant frequency of the resonator is found to be 6.45 kHz and 23 kHz for mode 1 and mode 2 (in y and z direction), respectively. The frequency decreases with increasing mass added on top of the CMOS-MEMS resonator membrane and the mass sensitivity of the resonator determined to be 0.18 Hz/pg. {\^A}{\copyright} 2012 IFSA.},
            issn = {17265479},
          author = {Ahmed, A. Y. and Dennis, J. O. and Md Khir, M. H. and Mohamad Saad, M. N. and Buyong, M. R.}
}