eprintid: 2435
rev_number: 2
eprint_status: archive
userid: 1
dir: disk0/00/00/24/35
datestamp: 2023-11-09 15:50:40
lastmod: 2023-11-09 15:50:40
status_changed: 2023-11-09 15:43:31
type: article
metadata_visibility: show
creators_name: Ahmad, F.
creators_name: Dennis, J.O.
creators_name: Md Khir, M.H.
creators_name: Hamid, N.H.
title: Modeling and layout design of resonant lateral comb magnetic sensor
ispublished: pub
keywords: Actuation mechanism; Damping ratio; Differential electrostatic actuators and PZR sensing; Interdigitated fingers; Layout designs; MEMS resonators; Piezo-resistive; Quality factors, Electrostatic actuators; Lorentz force; Microelectromechanical devices; Natural frequencies, Magnetic sensors
note: cited By 0
abstract: This paper covers the modeling and layout design of CMOS resonant lateral comb magnetic sensor capable of measuring magnetic field in the nanotesla range. The actuation mechanism of this sensor is based on differential electrostatic along with Lorentz force and sensing is piezoresistive. Cadence virtuoso is used to create the layout of resonant magnetic sensor according to design rules of MIMOS Bhd. All CMOS layers i.e. three metal and two poly layers are used in the structure to fabricate the magnetic sensor to enhance the sensitivity. At sensor output, without any amplification its sensitivity is 1.4807 μV/μT at 0.001 damping ratio with quality factor 500 and resonant frequency 9.35 kHz. © 2012 IFSA.
date: 2012
official_url: https://www.scopus.com/inward/record.uri?eid=2-s2.0-84879756114&partnerID=40&md5=a0a26dd873af0855a8490347c26ce1b1
full_text_status: none
publication: Sensors and Transducers
volume: 17
number: SPL 12
pagerange: 1-12
refereed: TRUE
issn: 17265479
citation:   Ahmad, F. and Dennis, J.O. and Md Khir, M.H. and Hamid, N.H.  (2012) Modeling and layout design of resonant lateral comb magnetic sensor.  Sensors and Transducers, 17 (SPL 12).  pp. 1-12.  ISSN 17265479