eprintid: 2432
rev_number: 2
eprint_status: archive
userid: 1
dir: disk0/00/00/24/32
datestamp: 2023-11-09 15:50:39
lastmod: 2023-11-09 15:50:39
status_changed: 2023-11-09 15:43:31
type: article
metadata_visibility: show
creators_name: Mirza, A.
creators_name: Hamid, N.H.
creators_name: Khir, M.H.M.
creators_name: Dennis, J.O.
creators_name: Ashraf, K.
title: DC characterization and post-CMOS processing of a microcantilever sensor
ispublished: pub
keywords: CMOS-MEMS; Deep Reactive Ion Etching; DRIE; Manufacturing tolerances; Micro cantilever sensors; Micromachining techniques; Post-CMOS; Signal processing electronics, Chemical detection; Composite micromechanics; MEMS; Monolithic integrated circuits; Signal processing, Chemical sensors
note: cited By 0
abstract: Microcantilever sensors have attracted marvelous consideration in recent years and numerous chemical and biological detections have been performed. Monolithic integration of a microcantilever with the signal processing electronics can not only lower the sensor development cost but also reduce the total system size. However, the curling of the microstructures fabricated in the composite metal-oxide thin-film of the CMOS-MEMS process, greatly affects the overlapping area between the static and moveable capacitive comb fingers and hence offers potential challenges in capacitive sensing. This paper reports fabrication of a microcantilever using post-CMOS micromachining technique. Backside deep reactive ion etching is used to keep a silicon layer attached with the thin-film and hence control the buckling of the cantilever. DC characterization of the sensor has been carried out. The experimental results are compared with the theoretical model, in order to estimate any manufacturing tolerance caused deviation of the parameters from the designed values. © 2012 IFSA.
date: 2012
official_url: https://www.scopus.com/inward/record.uri?eid=2-s2.0-84879763366&partnerID=40&md5=e8c0e53d966524c9a33bedc924892cf9
full_text_status: none
publication: Sensors and Transducers
volume: 17
number: SPL 12
pagerange: 13-21
refereed: TRUE
issn: 17265479
citation:   Mirza, A. and Hamid, N.H. and Khir, M.H.M. and Dennis, J.O. and Ashraf, K.  (2012) DC characterization and post-CMOS processing of a microcantilever sensor.  Sensors and Transducers, 17 (SPL 12).  pp. 13-21.  ISSN 17265479