?url_ver=Z39.88-2004&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.aufirst=A.&rft.aulast=Mirza&rft.au=Mirza%2C+A.&rft.issue=SPL+12&rft.volume=17&rft.issn=17265479&rft.atitle=DC+characterization+and+post-CMOS+processing+of+a+microcantilever+sensor&rft.pages=13-21&rft.title=Sensors+and+Transducers&rft.date=2012&rft.genre=article