?url_ver=Z39.88-2004&rft_id=10.1117%2F1.3643480&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.aufirst=J.&rft.aulast=Rouhi&rft.au=Rouhi%2C+J.&rft.volume=10&rft.issn=19325150&rft.issue=4&rft.atitle=Fabrication+of+nanogap+electrodes+via+nano-oxidation+mask+by+scanning+probe+microscopy+nanolithography&rft.title=Journal+of+Micro%2FNanolithography%2C+MEMS%2C+and+MOEMS&rft.date=2011&rft.genre=article