eprintid: 2022
rev_number: 2
eprint_status: archive
userid: 1
dir: disk0/00/00/20/22
datestamp: 2023-11-09 15:50:11
lastmod: 2023-11-09 15:50:11
status_changed: 2023-11-09 15:41:50
type: conference_item
metadata_visibility: show
creators_name: Ahmad, F.
creators_name: Hamid, N.H.
creators_name: Khir, M.H.Md.
creators_name: Dennis, J.O.
title: Characterization and simulation of optimized micro paddle bridge resonator for magnetic field measurements
ispublished: pub
keywords: Bridge resonators; Capacitance change; Capacitive detection; CMOS technology; CoventorWare; Critical damping; Designed models; Electrostatic actuation; Lorentz; Micro paddle bridge resonator; Novel design; Proof mass; Resonant condition; Resonant magnetic field sensors; Sensing electrode; Silicon substrates; Structure parameter; Theoretical values; Vacuum packaging; Vibration amplitude, CMOS integrated circuits; Electrostatic actuators; Electrostatics; Lorentz force; Magnetic field measurement; Magnetic fields; Magnetic flux; Magnetic sensors; Natural frequencies; Optimization; Photonics, Resonators
note: cited By 0; Conference of Saudi International Electronics, Communications and Photonics Conference 2011, SIECPC 2011 ; Conference Date: 23 April 2011 Through 26 April 2011; Conference Code:85404
abstract: A novel design of micro paddle bridge resonant magnetic field sensor based on electrostatic actuation and capacitive detection technique is characterized and simulated using CoventorWare. The sensor consists of Aluminum plus shape paddle bridge resonator with two proof mass arms, driving electrodes, sensing electrode and silicon substrate. Working in a resonant condition, the sensor's vibration amplitude is converted into the sensing capacitance change, which reflects the outside magnetic flux-density. Based on the simulation, the key structure parameters are optimized and the resonant frequency is estimated. The results of the device are in accordance with the theoretical values of the designed model. The results indicate its sensitivity 0.252 pA/uT, when operating at 10 of critical damping. The sensitivity and resolution can be enhanced through vacuum packaging. © 2011 IEEE.
date: 2011
official_url: https://www.scopus.com/inward/record.uri?eid=2-s2.0-79960016367&doi=10.1109%2fSIECPC.2011.5876897&partnerID=40&md5=fed7d47483870af25657d4d3cd04e2ca
id_number: 10.1109/SIECPC.2011.5876897
full_text_status: none
publication: Saudi International Electronics, Communications and Photonics Conference 2011, SIECPC 2011
place_of_pub: Riyadh
refereed: TRUE
isbn: 9781457700699
citation:   Ahmad, F. and Hamid, N.H. and Khir, M.H.Md. and Dennis, J.O.  (2011) Characterization and simulation of optimized micro paddle bridge resonator for magnetic field measurements.  In: UNSPECIFIED.