TY  - CONF
KW  - Bridge resonators; Capacitance change; Capacitive detection; CMOS technology; CoventorWare; Critical damping; Designed models; Electrostatic actuation; Lorentz; Micro paddle bridge resonator; Novel design; Proof mass; Resonant condition; Resonant magnetic field sensors; Sensing electrode; Silicon substrates; Structure parameter; Theoretical values; Vacuum packaging; Vibration amplitude
KW  -  CMOS integrated circuits; Electrostatic actuators; Electrostatics; Lorentz force; Magnetic field measurement; Magnetic fields; Magnetic flux; Magnetic sensors; Natural frequencies; Optimization; Photonics
KW  -  Resonators
TI  - Characterization and simulation of optimized micro paddle bridge resonator for magnetic field measurements
ID  - scholars2022
N1  - cited By 0; Conference of Saudi International Electronics, Communications and Photonics Conference 2011, SIECPC 2011 ; Conference Date: 23 April 2011 Through 26 April 2011; Conference Code:85404
N2  - A novel design of micro paddle bridge resonant magnetic field sensor based on electrostatic actuation and capacitive detection technique is characterized and simulated using CoventorWare. The sensor consists of Aluminum plus shape paddle bridge resonator with two proof mass arms, driving electrodes, sensing electrode and silicon substrate. Working in a resonant condition, the sensor's vibration amplitude is converted into the sensing capacitance change, which reflects the outside magnetic flux-density. Based on the simulation, the key structure parameters are optimized and the resonant frequency is estimated. The results of the device are in accordance with the theoretical values of the designed model. The results indicate its sensitivity 0.252 pA/uT, when operating at 10 of critical damping. The sensitivity and resolution can be enhanced through vacuum packaging. © 2011 IEEE.
AV  - none
CY  - Riyadh
UR  - https://www.scopus.com/inward/record.uri?eid=2-s2.0-79960016367&doi=10.1109%2fSIECPC.2011.5876897&partnerID=40&md5=fed7d47483870af25657d4d3cd04e2ca
A1  - Ahmad, F.
A1  - Hamid, N.H.
A1  - Khir, M.H.Md.
A1  - Dennis, J.O.
SN  - 9781457700699
Y1  - 2011///
ER  -