relation: https://khub.utp.edu.my/scholars/2022/
title: Characterization and simulation of optimized micro paddle bridge resonator for magnetic field measurements
creator: Ahmad, F.
creator: Hamid, N.H.
creator: Khir, M.H.Md.
creator: Dennis, J.O.
description: A novel design of micro paddle bridge resonant magnetic field sensor based on electrostatic actuation and capacitive detection technique is characterized and simulated using CoventorWare. The sensor consists of Aluminum plus shape paddle bridge resonator with two proof mass arms, driving electrodes, sensing electrode and silicon substrate. Working in a resonant condition, the sensor's vibration amplitude is converted into the sensing capacitance change, which reflects the outside magnetic flux-density. Based on the simulation, the key structure parameters are optimized and the resonant frequency is estimated. The results of the device are in accordance with the theoretical values of the designed model. The results indicate its sensitivity 0.252 pA/uT, when operating at 10 of critical damping. The sensitivity and resolution can be enhanced through vacuum packaging. © 2011 IEEE.
date: 2011
type: Conference or Workshop Item
type: PeerReviewed
identifier:   Ahmad, F. and Hamid, N.H. and Khir, M.H.Md. and Dennis, J.O.  (2011) Characterization and simulation of optimized micro paddle bridge resonator for magnetic field measurements.  In: UNSPECIFIED.     
relation: https://www.scopus.com/inward/record.uri?eid=2-s2.0-79960016367&doi=10.1109%2fSIECPC.2011.5876897&partnerID=40&md5=fed7d47483870af25657d4d3cd04e2ca
relation: 10.1109/SIECPC.2011.5876897
identifier: 10.1109/SIECPC.2011.5876897