TY  - JOUR
JF  - Discover Nano
AV  - none
VL  - 18
N2  - Piezoelectric microelectromechanical system (piezo-MEMS)-based mass sensors including the piezoelectric microcantilevers, surface acoustic waves (SAW), quartz crystal microbalance (QCM), piezoelectric micromachined ultrasonic transducer (PMUT), and film bulk acoustic wave resonators (FBAR) are highlighted as suitable candidates for highly sensitive gas detection application. This paper presents the piezo-MEMS gas sensorsâ?? characteristics such as their miniaturized structure, the capability of integration with readout circuit, and fabrication feasibility using multiuser technologies. The development of the piezoelectric MEMS gas sensors is investigated for the application of low-level concentration gas molecules detection. In this work, the various types of gas sensors based on piezoelectricity are investigated extensively including their operating principle, besides their material parameters as well as the critical design parameters, the device structures, and their sensing materials including the polymers, carbon, metalâ??organic framework, and graphene. © 2023, The Author(s).
IS  - 1
KW  - Acoustic resonators; Acoustic surface wave filters; Acoustic waves; Chemical detection; Crystallography; Electromechanical devices; Gas detectors; Gases; MEMS; Piezoelectricity; Quartz crystal microbalances; Ultrasonic applications; Ultrasonic transducers
KW  -  BAW; Film bulk acoustic-wave resonators; Gas-sensors; Micro-cantilevers; Micro-machined ultrasonic transducer; Microelectromechanical system; Piezoelectric; Piezoelectric micromachined ultrasonic transducer; Sensing layers; Sensing principle; Surface acoustic waves
KW  -  Chemical sensors
TI  - A review of piezoelectric MEMS sensors and actuators for gas detection application
Y1  - 2023///
ID  - scholars19355
UR  - https://www.scopus.com/inward/record.uri?eid=2-s2.0-85149210227&doi=10.1186%2fs11671-023-03779-8&partnerID=40&md5=6e01689a095426c0a97437139849fdf8
A1  - Ba Hashwan, S.S.
A1  - Khir, M.H.M.
A1  - Nawi, I.M.
A1  - Ahmad, M.R.
A1  - Hanif, M.
A1  - Zahoor, F.
A1  - Al-Douri, Y.
A1  - Algamili, A.S.
A1  - Bature, U.I.
A1  - Alabsi, S.S.
A1  - Sabbea, M.O.B.
A1  - Junaid, M.
N1  - cited By 20
ER  -