?url_ver=Z39.88-2004&rft_id=10.1186%2Fs11671-023-03779-8&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.au=Ba+Hashwan%2C+S.S.&rft.aulast=Ba+Hashwan&rft.aufirst=S.S.&rft.title=Discover+Nano&rft.atitle=A+review+of+piezoelectric+MEMS+sensors+and+actuators+for+gas+detection+application&rft.volume=18&rft.date=2023&rft.issue=1&rft.genre=article