eprintid: 1920
rev_number: 2
eprint_status: archive
userid: 1
dir: disk0/00/00/19/20
datestamp: 2023-11-09 15:50:05
lastmod: 2023-11-09 15:50:05
status_changed: 2023-11-09 15:41:37
type: article
metadata_visibility: show
creators_name: Khir, M.H.M.
creators_name: Qu, P.
creators_name: Qu, H.
title: A low-cost CMOS-MEMS piezoresistive accelerometer with large proof mass
ispublished: pub
keywords: silicon, acceleration; article; calibration; chemistry; computer program; computer system; equipment design; heat; methodology; microelectromechanical system; scanning electron microscopy; semiconductor; sensitivity and specificity; statistical model; temperature, Acceleration; Calibration; Computer Systems; Equipment Design; Hot Temperature; Micro-Electrical-Mechanical Systems; Microscopy, Electron, Scanning; Models, Statistical; Semiconductors; Sensitivity and Specificity; Silicon; Software; Temperature
note: cited By 40
abstract: This paper reports a low-cost, high-sensitivity CMOS-MEMS piezoresistive accelerometer with large proof mass. In the device fabricated using ON Semiconductor 0.5 μm CMOS technology, an inherent CMOS polysilicon thin film is utilized as the piezoresistive sensing material. A full Wheatstone bridge was constructed through easy wiring allowed by the three metal layers in the 0.5 μm CMOS technology. The device fabrication process consisted of a standard CMOS process for sensor configuration, and a deep reactive ion etching (DRIE) based post-CMOS microfabrication for MEMS structure release. A bulk single-crystal silicon (SCS) substrate is included in the proof mass to increase sensor sensitivity. In device design and analysis, the self heating of the polysilicon piezoresistors and its effect to the sensor performance is also discussed. With a low operating power of 1.5 mW, the accelerometer demonstrates a sensitivity of 0.077 mV/g prior to any amplification. Dynamic tests have been conducted with a high-end commercial calibrating accelerometer as reference. © 2011 by the authors; licensee MDPI, Basel, Switzerland.
date: 2011
official_url: https://www.scopus.com/inward/record.uri?eid=2-s2.0-80052163190&doi=10.3390%2fs110807892&partnerID=40&md5=c6e3dc51eb84b8a592ffdcf5558ef28f
id_number: 10.3390/s110807892
full_text_status: none
publication: Sensors
volume: 11
number: 8
pagerange: 7892-7907
refereed: TRUE
issn: 14248220
citation:   Khir, M.H.M. and Qu, P. and Qu, H.  (2011) A low-cost CMOS-MEMS piezoresistive accelerometer with large proof mass.  Sensors, 11 (8).  pp. 7892-7907.  ISSN 14248220