TY  - JOUR
Y1  - 2011///
VL  - 11
A1  - Khir, M.H.M.
A1  - Qu, P.
A1  - Qu, H.
JF  - Sensors
UR  - https://www.scopus.com/inward/record.uri?eid=2-s2.0-80052163190&doi=10.3390%2fs110807892&partnerID=40&md5=c6e3dc51eb84b8a592ffdcf5558ef28f
ID  - scholars1920
KW  - silicon
KW  -  acceleration; article; calibration; chemistry; computer program; computer system; equipment design; heat; methodology; microelectromechanical system; scanning electron microscopy; semiconductor; sensitivity and specificity; statistical model; temperature
KW  -  Acceleration; Calibration; Computer Systems; Equipment Design; Hot Temperature; Micro-Electrical-Mechanical Systems; Microscopy
KW  -  Electron
KW  -  Scanning; Models
KW  -  Statistical; Semiconductors; Sensitivity and Specificity; Silicon; Software; Temperature
N2  - This paper reports a low-cost, high-sensitivity CMOS-MEMS piezoresistive accelerometer with large proof mass. In the device fabricated using ON Semiconductor 0.5 μm CMOS technology, an inherent CMOS polysilicon thin film is utilized as the piezoresistive sensing material. A full Wheatstone bridge was constructed through easy wiring allowed by the three metal layers in the 0.5 μm CMOS technology. The device fabrication process consisted of a standard CMOS process for sensor configuration, and a deep reactive ion etching (DRIE) based post-CMOS microfabrication for MEMS structure release. A bulk single-crystal silicon (SCS) substrate is included in the proof mass to increase sensor sensitivity. In device design and analysis, the self heating of the polysilicon piezoresistors and its effect to the sensor performance is also discussed. With a low operating power of 1.5 mW, the accelerometer demonstrates a sensitivity of 0.077 mV/g prior to any amplification. Dynamic tests have been conducted with a high-end commercial calibrating accelerometer as reference. © 2011 by the authors; licensee MDPI, Basel, Switzerland.
IS  - 8
SN  - 14248220
EP  - 7907
AV  - none
TI  - A low-cost CMOS-MEMS piezoresistive accelerometer with large proof mass
SP  - 7892
N1  - cited By 40
ER  -