?url_ver=Z39.88-2004&rft_id=10.3390%2Fs110807892&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.aufirst=M.H.M.&rft.au=Khir%2C+M.H.M.&rft.aulast=Khir&rft.volume=11&rft.issn=14248220&rft.issue=8&rft.atitle=A+low-cost+CMOS-MEMS+piezoresistive+accelerometer+with+large+proof+mass&rft.pages=7892-7907&rft.title=Sensors&rft.date=2011&rft.genre=article