eprintid: 1739
rev_number: 2
eprint_status: archive
userid: 1
dir: disk0/00/00/17/39
datestamp: 2023-11-09 15:49:54
lastmod: 2023-11-09 15:49:54
status_changed: 2023-11-09 15:41:15
type: conference_item
metadata_visibility: show
creators_name: Ahmed, A.Y.
creators_name: Dennis, J.O.
creators_name: Khir, M.H.M.
creators_name: Saad, M.N.M.
title: Analytical modeling of mass-sensitive gas sensor based on MEMS resonator
ispublished: pub
keywords: Active material; Analyte molecules; Analytical modeling; Gas detection; Gaseous species; Mass change; MEMS resonators; Micro cantilever sensors; Micro resonators; Micro-cantilevers; Micromachined, Adsorption; Analytical models; Chemical sensors; Composite micromechanics; Gas detectors; Microelectromechanical devices; Sustainable development, Natural frequencies
note: cited By 1; Conference of 3rd National Postgraduate Conference - Energy and Sustainability: Exploring the Innovative Minds, NPC 2011 ; Conference Date: 19 September 2011 Through 20 September 2011; Conference Code:88531
abstract: Modeling of a micromachined MEMS resonator for gas detection is presented in this paper. The principle of detection of the gaseous species is based on the change in resonant frequency of the microcantilever due to change in mass induced by the adsorption of an analyte molecule onto the surface of the active material deposited on the microresonator. The theoretical resonant frequency is found to be 20.1 kHz. The change in the resonant frequency δf 0.13 Hz when the mass changes by δm 43.2 fg on the resonator platform. The sensitivity is theoretical calculated to be0.3 Hz/pg. © 2011 IEEE.
date: 2011
official_url: https://www.scopus.com/inward/record.uri?eid=2-s2.0-84857066650&doi=10.1109%2fNatPC.2011.6136422&partnerID=40&md5=e9ee2a46b03d7b5804be7a6f2f9f40d1
id_number: 10.1109/NatPC.2011.6136422
full_text_status: none
publication: 2011 National Postgraduate Conference - Energy and Sustainability: Exploring the Innovative Minds, NPC 2011
place_of_pub: Perak
refereed: TRUE
isbn: 9781457718847
citation:   Ahmed, A.Y. and Dennis, J.O. and Khir, M.H.M. and Saad, M.N.M.  (2011) Analytical modeling of mass-sensitive gas sensor based on MEMS resonator.  In: UNSPECIFIED.