relation: https://khub.utp.edu.my/scholars/1739/
title: Analytical modeling of mass-sensitive gas sensor based on MEMS resonator
creator: Ahmed, A.Y.
creator: Dennis, J.O.
creator: Khir, M.H.M.
creator: Saad, M.N.M.
description: Modeling of a micromachined MEMS resonator for gas detection is presented in this paper. The principle of detection of the gaseous species is based on the change in resonant frequency of the microcantilever due to change in mass induced by the adsorption of an analyte molecule onto the surface of the active material deposited on the microresonator. The theoretical resonant frequency is found to be 20.1 kHz. The change in the resonant frequency δf 0.13 Hz when the mass changes by δm 43.2 fg on the resonator platform. The sensitivity is theoretical calculated to be0.3 Hz/pg. © 2011 IEEE.
date: 2011
type: Conference or Workshop Item
type: PeerReviewed
identifier:   Ahmed, A.Y. and Dennis, J.O. and Khir, M.H.M. and Saad, M.N.M.  (2011) Analytical modeling of mass-sensitive gas sensor based on MEMS resonator.  In: UNSPECIFIED.     
relation: https://www.scopus.com/inward/record.uri?eid=2-s2.0-84857066650&doi=10.1109%2fNatPC.2011.6136422&partnerID=40&md5=e9ee2a46b03d7b5804be7a6f2f9f40d1
relation: 10.1109/NatPC.2011.6136422
identifier: 10.1109/NatPC.2011.6136422