@inproceedings{scholars1739,
           title = {Analytical modeling of mass-sensitive gas sensor based on MEMS resonator},
         address = {Perak},
         journal = {2011 National Postgraduate Conference - Energy and Sustainability: Exploring the Innovative Minds, NPC 2011},
            note = {cited By 1; Conference of 3rd National Postgraduate Conference - Energy and Sustainability: Exploring the Innovative Minds, NPC 2011 ; Conference Date: 19 September 2011 Through 20 September 2011; Conference Code:88531},
             doi = {10.1109/NatPC.2011.6136422},
            year = {2011},
          author = {Ahmed, A. Y. and Dennis, J. O. and Khir, M. H. M. and Saad, M. N. M.},
            isbn = {9781457718847},
             url = {https://www.scopus.com/inward/record.uri?eid=2-s2.0-84857066650&doi=10.1109\%2fNatPC.2011.6136422&partnerID=40&md5=e9ee2a46b03d7b5804be7a6f2f9f40d1},
        keywords = {Active material; Analyte molecules; Analytical modeling; Gas detection; Gaseous species; Mass change; MEMS resonators; Micro cantilever sensors; Micro resonators; Micro-cantilevers; Micromachined, Adsorption; Analytical models; Chemical sensors; Composite micromechanics; Gas detectors; Microelectromechanical devices; Sustainable development, Natural frequencies},
        abstract = {Modeling of a micromachined MEMS resonator for gas detection is presented in this paper. The principle of detection of the gaseous species is based on the change in resonant frequency of the microcantilever due to change in mass induced by the adsorption of an analyte molecule onto the surface of the active material deposited on the microresonator. The theoretical resonant frequency is found to be 20.1 kHz. The change in the resonant frequency {\^I}?f 0.13 Hz when the mass changes by {\^I}?m 43.2 fg on the resonator platform. The sensitivity is theoretical calculated to be0.3 Hz/pg. {\^A}{\copyright} 2011 IEEE.}
}