?url_ver=Z39.88-2004&rft_id=10.3390%2Fmi13040525&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.aufirst=A.S.&rft.aulast=Algamili&rft.au=Algamili%2C+A.S.&rft.volume=13&rft.date=2022&rft.issue=4&rft.title=Micromachines&rft.issn=2072666X&rft.atitle=Fabrication+and+Characterization+of+the+Micro-Heater+and+Temperature+Sensor+for+PolyMUMPs-Based+MEMS+Gas+Sensor&rft.genre=article