eprintid: 1601
rev_number: 2
eprint_status: archive
userid: 1
dir: disk0/00/00/16/01
datestamp: 2023-11-09 15:49:46
lastmod: 2023-11-09 15:49:46
status_changed: 2023-11-09 15:40:58
type: conference_item
metadata_visibility: show
creators_name: Ahmad, F.
creators_name: Khir, M.H.M.
creators_name: Hamid, N.H.
creators_name: Dennis, J.O.
title: Theoretical analysis of resonant lateral electrostatic Comb drive actuator and sensor
ispublished: pub
keywords: At resonance; Comb resonator; Couette; Damping ratio; Electrostatic comb drives; Electrostatic drive; Interdigitated capacitors; interdigitated fingers; MEMS actuators; MEMS Resonators; MEMS sensors; Quality factors; Squeeze-film damping, Electrostatic force; Microelectromechanical devices; Natural frequencies; Resonators; Sensors; Spectral density; Surface micromachining; Sustainable development, Damping
note: cited By 4; Conference of 3rd National Postgraduate Conference - Energy and Sustainability: Exploring the Innovative Minds, NPC 2011 ; Conference Date: 19 September 2011 Through 20 September 2011; Conference Code:88531
abstract: This paper investigates the electrostatic drive, sense, spring behavior of long beams, resonant frequency, quality factor, resonator noise and damping of resonator parallel to the substrate, using an interdigitated capacitor (electrostatic comb). Resonant frequency of the device is 9.5 kHz with quality factor 104. Couette damping is dominant that is equal to 5.3410 8. The value of Squeeze film damping is small i.e. 2.43610 13 due to end faces of the fingers of comb resonator. Dominant noise is Brownian and spectral density of this noise force due to Couette and Squeeze film damping are 8.84310 28 and 4.03510 33 N 2/Hz respectively. At damping ratio 0.0048 electrostatic force of 29.5 nN produces 11.4m amplitude at resonance in the sensing fingers which shows capacitive sensitivity equals to 0.3684 fF/m. © 2011 IEEE.
date: 2011
official_url: https://www.scopus.com/inward/record.uri?eid=2-s2.0-84857093921&doi=10.1109%2fNatPC.2011.6136435&partnerID=40&md5=772656ee03c51b83803b74760e8826f2
id_number: 10.1109/NatPC.2011.6136435
full_text_status: none
publication: 2011 National Postgraduate Conference - Energy and Sustainability: Exploring the Innovative Minds, NPC 2011
place_of_pub: Perak
refereed: TRUE
isbn: 9781457718847
citation:   Ahmad, F. and Khir, M.H.M. and Hamid, N.H. and Dennis, J.O.  (2011) Theoretical analysis of resonant lateral electrostatic Comb drive actuator and sensor.  In: UNSPECIFIED.