?url_ver=Z39.88-2004&rft_id=10.1109%2FNatPC.2011.6136435&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Abook&rft.au=Ahmad%2C+F.&rft.aulast=Ahmad&rft.aufirst=F.&rft.isbn=9781457718847&rft.title=Theoretical+analysis+of+resonant+lateral+electrostatic+Comb+drive+actuator+and+sensor&rft.date=2011&rft.genre=proceeding