eprintid: 15459 rev_number: 2 eprint_status: archive userid: 1 dir: disk0/00/01/54/59 datestamp: 2023-11-10 03:30:05 lastmod: 2023-11-10 03:30:05 status_changed: 2023-11-10 01:59:32 type: conference_item metadata_visibility: show creators_name: Al-Mahdi, O.L.Q. creators_name: Ahmed, A.Y. creators_name: Dennis, J.O. creators_name: Md. Khir, M.H. title: Modeling of a Highly Sensitive Lorentz Force-Based CMOS-MEMS Magnetometer for E-Compass Applications ispublished: pub keywords: Bridge circuits; CMOS integrated circuits; Computer software; Magnetometers; MEMS; Microelectromechanical devices, And CMOS technology; CMOS technology; CMOS-MEMS; Compass application; CoventorWare; Force-based; High costs; High power consumption; Low sensitivity; Magnetic-field, Lorentz force note: cited By 1; Conference of 8th International Conference on Intelligent and Advanced Systems, ICIAS 2021 ; Conference Date: 13 July 2021 Through 15 July 2021; Conference Code:175661 abstract: Magnetometers are devices used to measure the magnetic field, however, most commercialized magnetometers are facing several disadvantages. If not being of low sensitivity, the device attains a high cost and high-power consumption. Thus, it is a necessity to mathematically design and model CMOS-MEMS magnetometer which will be able to detect low magnetic fields. A fine simulation using ConventorWare software is applied to validate the designed magnetometer model. In this paper, Lorentz force and an integration of CMOS and MEMS technologies were implemented The designed magnetometer is made in one mode (out-of-plane) to function in one axis (z-axis), and the CMOS-MEMS magnetometer output signal is determined by piezoresistive sensing technique as piezoresistors are connected in full Wheatstone bridge circuit. A 3-D solid model was created and meshed based on the theoretical calculations and data. Simulation results shows that theoretical and simulation results are almost the same, except that resonance frequency is of 11 difference and 11.6 for quality factor. The average percentage difference between calculated and simulated displacement when magnetic field is detected to be of 2.801. © 2021 IEEE. date: 2021 publisher: Institute of Electrical and Electronics Engineers Inc. official_url: https://www.scopus.com/inward/record.uri?eid=2-s2.0-85124156091&doi=10.1109%2fICIAS49414.2021.9642619&partnerID=40&md5=08f2705b7f09d0329e8c5b15e636df08 id_number: 10.1109/ICIAS49414.2021.9642619 full_text_status: none publication: International Conference on Intelligent and Advanced Systems: Enhance the Present for a Sustainable Future, ICIAS 2021 refereed: TRUE isbn: 9781728176666 citation: Al-Mahdi, O.L.Q. and Ahmed, A.Y. and Dennis, J.O. and Md. Khir, M.H. (2021) Modeling of a Highly Sensitive Lorentz Force-Based CMOS-MEMS Magnetometer for E-Compass Applications. In: UNSPECIFIED.