?url_ver=Z39.88-2004&rft_id=10.1109%2FICIAS49414.2021.9642706&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Abook&rft.au=Ba+Hashwan%2C+S.S.&rft.aulast=Ba+Hashwan&rft.aufirst=S.S.&rft.title=Design+and+Simulation+of+MEMS+Electrostatic+Resonator+for+Ammonia+Gas+Detection+Based+on+SOIMUMPs&rft.isbn=9781728176666&rft.date=2021&rft.genre=proceeding