eprintid: 15370
rev_number: 2
eprint_status: archive
userid: 1
dir: disk0/00/01/53/70
datestamp: 2023-11-10 03:29:59
lastmod: 2023-11-10 03:29:59
status_changed: 2023-11-10 01:59:19
type: conference_item
metadata_visibility: show
creators_name: Algamili, A.S.
creators_name: Khir, M.H.
creators_name: Ahmed, A.Y.
creators_name: Al-Mahdi, O.L.
creators_name: Ba-Hashwan, S.S.
creators_name: Alabsi, S.S.
title: Modeling of the PolyMUMPs-Based MEMS Sensor for Application in Trace Gas Detection
ispublished: pub
keywords: Chemical sensors; Gas detectors; Gases; MEMS, Frequency quality; Gas detection sensors; Gas-sensors; Mass sensitivity; MEMS (microelectromechanical system); Micro-electro-mechanical system device; Multi-user MEMS process; Poly-MUMP; Quality factors; Resonance frequencies, Natural frequencies
note: cited By 3; Conference of 2021 International Conference on Intelligent Cybernetics Technology and Applications, ICICyTA 2021 ; Conference Date: 1 December 2021 Through 2 December 2021; Conference Code:176965
abstract: Gas detection sensor is crucial in many practical applications. However, numerous of the existing gas sensors still suffering from high power consumption, damping, and poor accuracy. These factors have a significant impact on the gas detection sensor's sensitivity and reliability. A Micro-Electro-Mechanical System (MEMS) is presented in this paper, along with its model with high efficiency. The sensor is based on standard Polysilicon Multi-Users-MEMS-Process (PolyMUMPs). The detection of gaseous species is dependent on a changes in the sensor's resonance frequency. The resonance frequency, quality factor, and mass sensitivity are observed to reduce as the beam length increases and to rise as the beam width increases. While overall mass rises as the length/width of the beam both increases. The analytical findings of the resonance frequency, quality factor, and mass sensitivity are found to be 9.3747 kHz, 4.5183, and 5.1676 mHz/pg, respectively. © 2021 IEEE.
date: 2021
publisher: Institute of Electrical and Electronics Engineers Inc.
official_url: https://www.scopus.com/inward/record.uri?eid=2-s2.0-85126590150&doi=10.1109%2fICICyTA53712.2021.9689204&partnerID=40&md5=8cca6847e29ad55faffb929bd482001e
id_number: 10.1109/ICICyTA53712.2021.9689204
full_text_status: none
publication: 2021 International Conference on Intelligent Cybernetics Technology and Applications, ICICyTA 2021
pagerange: 58-63
refereed: TRUE
isbn: 9781665417778
citation:   Algamili, A.S. and Khir, M.H. and Ahmed, A.Y. and Al-Mahdi, O.L. and Ba-Hashwan, S.S. and Alabsi, S.S.  (2021) Modeling of the PolyMUMPs-Based MEMS Sensor for Application in Trace Gas Detection.  In: UNSPECIFIED.