TY  - CONF
SP  - 58
TI  - Modeling of the PolyMUMPs-Based MEMS Sensor for Application in Trace Gas Detection
ID  - scholars15370
KW  - Chemical sensors; Gas detectors; Gases; MEMS
KW  -  Frequency quality; Gas detection sensors; Gas-sensors; Mass sensitivity; MEMS (microelectromechanical system); Micro-electro-mechanical system device; Multi-user MEMS process; Poly-MUMP; Quality factors; Resonance frequencies
KW  -  Natural frequencies
N2  - Gas detection sensor is crucial in many practical applications. However, numerous of the existing gas sensors still suffering from high power consumption, damping, and poor accuracy. These factors have a significant impact on the gas detection sensor's sensitivity and reliability. A Micro-Electro-Mechanical System (MEMS) is presented in this paper, along with its model with high efficiency. The sensor is based on standard Polysilicon Multi-Users-MEMS-Process (PolyMUMPs). The detection of gaseous species is dependent on a changes in the sensor's resonance frequency. The resonance frequency, quality factor, and mass sensitivity are observed to reduce as the beam length increases and to rise as the beam width increases. While overall mass rises as the length/width of the beam both increases. The analytical findings of the resonance frequency, quality factor, and mass sensitivity are found to be 9.3747 kHz, 4.5183, and 5.1676 mHz/pg, respectively. © 2021 IEEE.
N1  - cited By 3; Conference of 2021 International Conference on Intelligent Cybernetics Technology and Applications, ICICyTA 2021 ; Conference Date: 1 December 2021 Through 2 December 2021; Conference Code:176965
AV  - none
EP  - 63
A1  - Algamili, A.S.
A1  - Khir, M.H.
A1  - Ahmed, A.Y.
A1  - Al-Mahdi, O.L.
A1  - Ba-Hashwan, S.S.
A1  - Alabsi, S.S.
UR  - https://www.scopus.com/inward/record.uri?eid=2-s2.0-85126590150&doi=10.1109%2fICICyTA53712.2021.9689204&partnerID=40&md5=8cca6847e29ad55faffb929bd482001e
PB  - Institute of Electrical and Electronics Engineers Inc.
SN  - 9781665417778
Y1  - 2021///
ER  -