relation: https://khub.utp.edu.my/scholars/15370/
title: Modeling of the PolyMUMPs-Based MEMS Sensor for Application in Trace Gas Detection
creator: Algamili, A.S.
creator: Khir, M.H.
creator: Ahmed, A.Y.
creator: Al-Mahdi, O.L.
creator: Ba-Hashwan, S.S.
creator: Alabsi, S.S.
description: Gas detection sensor is crucial in many practical applications. However, numerous of the existing gas sensors still suffering from high power consumption, damping, and poor accuracy. These factors have a significant impact on the gas detection sensor's sensitivity and reliability. A Micro-Electro-Mechanical System (MEMS) is presented in this paper, along with its model with high efficiency. The sensor is based on standard Polysilicon Multi-Users-MEMS-Process (PolyMUMPs). The detection of gaseous species is dependent on a changes in the sensor's resonance frequency. The resonance frequency, quality factor, and mass sensitivity are observed to reduce as the beam length increases and to rise as the beam width increases. While overall mass rises as the length/width of the beam both increases. The analytical findings of the resonance frequency, quality factor, and mass sensitivity are found to be 9.3747 kHz, 4.5183, and 5.1676 mHz/pg, respectively. © 2021 IEEE.
publisher: Institute of Electrical and Electronics Engineers Inc.
date: 2021
type: Conference or Workshop Item
type: PeerReviewed
identifier:   Algamili, A.S. and Khir, M.H. and Ahmed, A.Y. and Al-Mahdi, O.L. and Ba-Hashwan, S.S. and Alabsi, S.S.  (2021) Modeling of the PolyMUMPs-Based MEMS Sensor for Application in Trace Gas Detection.  In: UNSPECIFIED.     
relation: https://www.scopus.com/inward/record.uri?eid=2-s2.0-85126590150&doi=10.1109%2fICICyTA53712.2021.9689204&partnerID=40&md5=8cca6847e29ad55faffb929bd482001e
relation: 10.1109/ICICyTA53712.2021.9689204
identifier: 10.1109/ICICyTA53712.2021.9689204