?url_ver=Z39.88-2004&rft_id=10.1109%2FICICyTA53712.2021.9689204&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Abook&rft.aulast=Algamili&rft.au=Algamili%2C+A.S.&rft.aufirst=A.S.&rft.date=2021&rft.title=Modeling+of+the+PolyMUMPs-Based+MEMS+Sensor+for+Application+in+Trace+Gas+Detection&rft.isbn=9781665417778&rft.genre=proceeding