eprintid: 14672
rev_number: 2
eprint_status: archive
userid: 1
dir: disk0/00/01/46/72
datestamp: 2023-11-10 03:29:15
lastmod: 2023-11-10 03:29:15
status_changed: 2023-11-10 01:57:31
type: conference_item
metadata_visibility: show
creators_name: Ba Hashwan, S.S.
creators_name: Khir, M.H.M.
creators_name: Al-Douri, Y.
creators_name: Ahmed, A.Y.
creators_name: Algamili, A.S.
creators_name: Alabsi, S.S.
creators_name: Junaid, M.M.
title: Analytical Modeling of AIN-Based Film Bulk Acoustic Wave Resonator for Hydrogen sulfide Gas detection Based on PiezoMUMPs
ispublished: pub
keywords: Acoustic resonators; Acoustic surface wave filters; Aluminum nitride; Copper oxides; Electrodes; Gas detectors; Gases; Graphene; III-V semiconductors; MATLAB; Molecules; Nanostructured materials; Natural frequencies; Sulfur compounds; Sulfur determination, Fabrication Technologies; Film bulk acoustic-wave resonators; Hydrogen sulfide gas; Mathematical equations; Matlab- software; Resonant frequency change; Sensor surfaces; Thin film bulk acoustic resonator, Hydrogen sulfide
note: cited By 3; Conference of 1st International Conference on Engineering and Technology, ICoEngTech 2021 ; Conference Date: 15 March 2021 Through 16 March 2021; Conference Code:170733
abstract: Aluminium nitride (AIN) thin film bulk acoustic resonator (FBAR) sensor for hydrogen sulfide gas detection has been designed and mathematically modelled using CoventorWare and MATLAB software, respectively. The designed FBAR sensor is based on the PiezoMUMPs fabrication technology. The detection principle of the FBAR gas sensor is based on the resonant frequency changes detection due to the mass change on the top electrode of the sensor induced by the absorbed gas molecules by the nanomaterial deposited on the surface of the top electrode device. Reduced graphene oxide hybrid with copper oxide was considered as the sensitive nanomaterials and their mass loaded was evaluated in the theoretically calculation. The resonant frequency of the shear mode of the FBAR sensor has been calculated theoretically and found to be 9.4524 GHz. The effects of the gas molecules on the resonant frequency have been investigated using a mathematical equation and it shown that the increasing of the gas mass on the sensor surface will reduce the sensor resonant frequency. Furthermore, the sensitivity of the sensor was calculated to be 0.22615 Hz/fg. © Published under licence by IOP Publishing Ltd.
date: 2021
publisher: IOP Publishing Ltd
official_url: https://www.scopus.com/inward/record.uri?eid=2-s2.0-85111984504&doi=10.1088%2f1742-6596%2f1962%2f1%2f012003&partnerID=40&md5=53c383caf866f19dfaab5aec1ac35b6e
id_number: 10.1088/1742-6596/1962/1/012003
full_text_status: none
publication: Journal of Physics: Conference Series
volume: 1962
number: 1
refereed: TRUE
issn: 17426588
citation:   Ba Hashwan, S.S. and Khir, M.H.M. and Al-Douri, Y. and Ahmed, A.Y. and Algamili, A.S. and Alabsi, S.S. and Junaid, M.M.  (2021) Analytical Modeling of AIN-Based Film Bulk Acoustic Wave Resonator for Hydrogen sulfide Gas detection Based on PiezoMUMPs.  In: UNSPECIFIED.