?url_ver=Z39.88-2004&rft_id=10.1088%2F1742-6596%2F1962%2F1%2F012003&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Abook&rft.au=Ba+Hashwan%2C+S.S.&rft.aulast=Ba+Hashwan&rft.aufirst=S.S.&rft.date=2021&rft.issn=17426588&rft.title=Analytical+Modeling+of+AIN-Based+Film+Bulk+Acoustic+Wave+Resonator+for+Hydrogen+sulfide+Gas+detection+Based+on+PiezoMUMPs&rft.genre=proceeding