eprintid: 1432
rev_number: 2
eprint_status: archive
userid: 1
dir: disk0/00/00/14/32
datestamp: 2023-11-09 15:49:35
lastmod: 2023-11-09 15:49:35
status_changed: 2023-11-09 15:40:36
type: conference_item
metadata_visibility: show
creators_name: Ahmad, F.
creators_name: Khir, M.H.M.
creators_name: Hamid, N.H.
creators_name: Dennis, J.O.
title: Analytical modeling of plus shape MEMS paddle bridge resonant sensor for weak magnetic fields
ispublished: pub
keywords: Analytical modeling; Electrostatic actuation; Lorentz; Micro paddle bridge resonator; Rayleigh method, Computer simulation; Damping; Electrostatic actuators; Electrostatics; Lorentz force; Magnetic fields; Mathematical models; Models; Natural frequencies; Optimization; Resonators; Sensors, Bridges
note: cited By 2; Conference of 2011 IEEE Regional Symposium on Micro and Nano Electronics, RSM 2011 ; Conference Date: 28 September 2011 Through 30 September 2011; Conference Code:87842
abstract: In this paper, we present an analytical model of novel plus shape MEMS paddle bridge resonant sensor to estimate electromechanical behavior, damping, electrostatic actuation and capacitive detection. The analytical model is derived using the Reynold's method for squeeze film and Rayleigh method for resonant frequency. Working in a resonant condition, the sensor's vibration amplitude is converted into the sensing current, which reflects the outside magnetic field. The first bending mode resonant frequency of optimized device is estimated at different values of damping ratios. The analytical results of the device are verified with the simulation. The results indicate its sensitivity 0.3163 pA/T, when operating at optimized damping ratio 0.056 and 26.58 improvement in capacitive sensitivity with respect to ordinary paddle bridge. Our analytical model can be useful in the mechanical design of different shapes of paddle bridge resonators with complex structural configurations. © 2011 IEEE.
date: 2011
official_url: https://www.scopus.com/inward/record.uri?eid=2-s2.0-83755173793&doi=10.1109%2fRSM.2011.6088350&partnerID=40&md5=fd6daee2c6841caefb9f563613c36d46
id_number: 10.1109/RSM.2011.6088350
full_text_status: none
publication: 2011 IEEE Regional Symposium on Micro and Nanoelectronics, RSM 2011 - Programme and Abstracts
place_of_pub: Kota Kinabalu, Sabah
pagerange: 310-314
refereed: TRUE
isbn: 9781612848464
citation:   Ahmad, F. and Khir, M.H.M. and Hamid, N.H. and Dennis, J.O.  (2011) Analytical modeling of plus shape MEMS paddle bridge resonant sensor for weak magnetic fields.  In: UNSPECIFIED.