%C Kota Kinabalu, Sabah
%T Design, modeling and simulation of CMOS MEMS cantilever for carbon dioxide gas sensing
%A A. Mirza
%A M.H.M. Khir
%A J.O. Dennis
%A K. Ashraf
%A N.H. Hamid
%P 324-328
%X Carbon dioxide sensors have potential applications in medical diagnoses, health care, environmental monitoring, food and medicine industry. In recent years, many novel biological, physical and chemical sensors have employed microcantilevers due to their simplicity, ease of fabrication and integration with electronics. This paper presents design, modeling and simulation of a microcantilever working in dynamic mode for CO 2 gas sensing with electromagnetic actuation and capacitive sensing using comb fingers. The sensor is based upon 0.35 micron CMOS technology. CoventorWare and MATLAB have been used as simulation software. According to the developed model and simulation results the resonator has a quality factor of 3333 in air and mass sensitivity of 3.2 Hz/ng. © 2011 IEEE.
%K Capacitive sensing; Carbon dioxide sensors; CMOS; CMOS technology; CMOS-MEMS; Comb fingers; CoventorWare; Developed model; Dynamic modes; Electromagnetic actuation; Environmental Monitoring; Gas sensing; Mass sensitivity; Micro-cantilevers; Modeling and simulation; Potential applications; Quality factors; Simulation software, Carbon; Carbon dioxide; Chemical detection; Chemical sensors; CMOS integrated circuits; Composite micromechanics; Computer software; Diagnosis; Gas detectors; Health care; MATLAB; MEMS; Resonators; Sensors, Computer simulation
%D 2011
%R 10.1109/RSM.2011.6088353
%O cited By 5; Conference of 2011 IEEE Regional Symposium on Micro and Nano Electronics, RSM 2011 ; Conference Date: 28 September 2011 Through 30 September 2011; Conference Code:87842
%L scholars1428
%J 2011 IEEE Regional Symposium on Micro and Nanoelectronics, RSM 2011 - Programme and Abstracts