?url_ver=Z39.88-2004&rft_id=10.3390%2Fs21237863&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.aufirst=M.&rft.au=Hanif%2C+M.&rft.aulast=Hanif&rft.title=Sensors&rft.issue=23&rft.atitle=FEM+analysis+of+various+multilayer+structures+for+CMOS+compatible+wearable+acousto-optic+devices&rft.volume=21&rft.date=2021&rft.issn=14248220&rft.genre=article