eprintid: 13864
rev_number: 2
eprint_status: archive
userid: 1
dir: disk0/00/01/38/64
datestamp: 2023-11-10 03:28:25
lastmod: 2023-11-10 03:28:25
status_changed: 2023-11-10 01:52:11
type: article
metadata_visibility: show
creators_name: Algamili, A.
creators_name: Ahmed, A.
creators_name: Dennis, J.
creators_name: Khir, M.
creators_name: Mutharpavalar, A.
title: Analytical modelling of the effect of squeeze film damping on the frequency and quality factor of a poly MUMPs resonator
ispublished: pub
note: cited By 1
abstract: This paper reports analytical modelling of the squeeze film damping effect of a standard Polysilicon Multi-Users MEMS Process (Poly MUMPs) resonators. Poly MUMPs resonator has been designed for the purpose of gas detection. Generally, damping is present in all vibrating systems in the real world with an exception of systems vibrating in a vacuum environment. The air damping is considered the major source of energy dissipation and has a main influence on these vibration systems. To reduce the effect of the squeeze film damping, the movable top plate of the Poly MUMPs resonator has been investigated by changing the size of the etched holes perforated to improve the resonance frequency and quality factor of the Poly MUMPs resonator. Electro thermal actuation method will be used to drive the resonator in the dynamic mode and the output voltage will be measured using an MS3110 universal capacitive readout circuit. The results show that by increasing the size of the etched holes from 6 µm to 10 µm, the squeeze film damping is decreased from 47.303 μN.m to 24.007 μN.m, respectively. This will affect the resonance frequency to increase from 3904.022 Hz to 4483.783 Hz, as well as and the quality factor from 0.999 to 1.912, respectively. © 2020, Institute of Advanced Scientific Research, Inc. All rights reserved.
date: 2020
publisher: Institute of Advanced Scientific Research, Inc.
official_url: https://www.scopus.com/inward/record.uri?eid=2-s2.0-85085321108&doi=10.5373%2fJARDCS%2fV12SP4%2f20201644&partnerID=40&md5=dfd4ef7f7e98a3e220bef9d0972ffa39
id_number: 10.5373/JARDCS/V12SP4/20201644
full_text_status: none
publication: Journal of Advanced Research in Dynamical and Control Systems
volume: 12
number: 4 Spec
pagerange: 1634-1641
refereed: TRUE
issn: 1943023X
citation:   Algamili, A. and Ahmed, A. and Dennis, J. and Khir, M. and Mutharpavalar, A.  (2020) Analytical modelling of the effect of squeeze film damping on the frequency and quality factor of a poly MUMPs resonator.  Journal of Advanced Research in Dynamical and Control Systems, 12 (4 Spec).  pp. 1634-1641.  ISSN 1943023X