?url_ver=Z39.88-2004&rft_id=10.5373%2FJARDCS%2FV12SP4%2F20201644&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.aufirst=A.&rft.aulast=Algamili&rft.au=Algamili%2C+A.&rft.issn=1943023X&rft.date=2020&rft.atitle=Analytical+modelling+of+the+effect+of+squeeze+film+damping+on+the+frequency+and+quality+factor+of+a+poly+MUMPs+resonator&rft.pages=1634-1641&rft.volume=12&rft.issue=4+Spec&rft.title=Journal+of+Advanced+Research+in+Dynamical+and+Control+Systems&rft.genre=article