eprintid: 1334
rev_number: 2
eprint_status: archive
userid: 1
dir: disk0/00/00/13/34
datestamp: 2023-11-09 15:49:29
lastmod: 2023-11-09 15:49:29
status_changed: 2023-11-09 15:39:31
type: conference_item
metadata_visibility: show
creators_name: Ariwahjoedi, B.
creators_name: Fuad, Kh.
creators_name: Ariefin, M.
title: Direct solid-state electrochemical synthesis of silicon tetrachloride from silica at ambient temperatures and pressures
ispublished: pub
keywords: Atmospheric pressure; Electrochemistry; Microelectronics; Silica; Silicon oxides; Sodium chloride, Ambient conditions; Electrochemical synthesis; IV characterization; Microelectronic industry; Rice husk; Silicon tetrachloride; Sodium chloride (NaCl), Atmospheric temperature
note: cited By 2
abstract: Silicon tetrachloride (SiCl4) is one of the most important chemical compounds in the microelectronic industries. Commercial scale synthesis of SiCl4 is usually performed by roasting silica (SiO2) and cokes (C) under flowing chlorine (Cl2) gas at temperatures �900°C. At room temperatures and atmospheric pressures, the formation of SiCl4 from Cl2, SiO2 and C can be calculated to be favorable with �Greaction as low as -120.77 kJ/mol. This paper reports the use of I-V characterization technique in ambient conditions SiCl4 synthesis via direct solid state electrochemical synthesis reaction, starting with sodium chloride (NaCl), rice-husk derived-SiO 2, and C (graphite/charcoal mixture). ©The Electrochemical Society.
date: 2010
publisher: Electrochemical Society Inc.
official_url: https://www.scopus.com/inward/record.uri?eid=2-s2.0-79959523526&doi=10.1149%2f1.3490301&partnerID=40&md5=fb203777e9a423542363b4a77678d2d1
id_number: 10.1149/1.3490301
full_text_status: none
publication: ECS Transactions
volume: 28
number: 16
pagerange: 45-56
refereed: TRUE
isbn: 9781566778428; 9781607681922
issn: 19385862
citation:   Ariwahjoedi, B. and Fuad, Kh. and Ariefin, M.  (2010) Direct solid-state electrochemical synthesis of silicon tetrachloride from silica at ambient temperatures and pressures.  In: UNSPECIFIED.