eprintid: 13016
rev_number: 2
eprint_status: archive
userid: 1
dir: disk0/00/01/30/16
datestamp: 2023-11-10 03:27:34
lastmod: 2023-11-10 03:27:34
status_changed: 2023-11-10 01:50:08
type: conference_item
metadata_visibility: show
creators_name: Hanif, M.
creators_name: Jeoti, V.
creators_name: Aslam, M.Z.
title: FEM simulation analysis of TiO2/ZnO/SiO2/Si multilayer structure for CMOS compatible acousto-optic tunable filter
ispublished: pub
keywords: Acoustooptical effects; CMOS integrated circuits; Electromechanical coupling; Finite element method; II-VI semiconductors; Multilayers; Silicon compounds; Sports; Titanium dioxide; Zinc oxide, Acousto-optic tunable filters; Different thickness; FEM simulations; Figure of merit (FOM); Figure of merits; Layer structures; Multilayer structures; Propagation characteristics, Oxide minerals
note: cited By 2; Conference of 2nd Joint International Conference on Emerging Computing Technology and Sports, JICETS 2019 ; Conference Date: 25 November 2019 Through 27 November 2019; Conference Code:161273
abstract: In this paper, TiO2/ZnO/SiO2/Si layer structures with different thickness of ZnO and TiO2 is discussed and explained. The study is carried out in order to obtain optimal normalized thickness of the multilayer structure for fabricating acousto-optic tunable filter with high figure of merit (FOM). Based on simulation and study of SAW propagation characteristics like, electromechanical coupling co-efficient, figure of merit and phase velocity, it is inferred that this structure is suitable for the desired application. © 2020 IOP Publishing Ltd. All rights reserved.
date: 2020
publisher: Institute of Physics Publishing
official_url: https://www.scopus.com/inward/record.uri?eid=2-s2.0-85087438070&doi=10.1088%2f1742-6596%2f1529%2f5%2f052039&partnerID=40&md5=0dc172622ef7a56d2328be7050a0b7ed
id_number: 10.1088/1742-6596/1529/5/052039
full_text_status: none
publication: Journal of Physics: Conference Series
volume: 1529
number: 5
refereed: TRUE
issn: 17426588
citation:   Hanif, M. and Jeoti, V. and Aslam, M.Z.  (2020) FEM simulation analysis of TiO2/ZnO/SiO2/Si multilayer structure for CMOS compatible acousto-optic tunable filter.  In: UNSPECIFIED.