relation: https://khub.utp.edu.my/scholars/13016/
title: FEM simulation analysis of TiO2/ZnO/SiO2/Si multilayer structure for CMOS compatible acousto-optic tunable filter
creator: Hanif, M.
creator: Jeoti, V.
creator: Aslam, M.Z.
description: In this paper, TiO2/ZnO/SiO2/Si layer structures with different thickness of ZnO and TiO2 is discussed and explained. The study is carried out in order to obtain optimal normalized thickness of the multilayer structure for fabricating acousto-optic tunable filter with high figure of merit (FOM). Based on simulation and study of SAW propagation characteristics like, electromechanical coupling co-efficient, figure of merit and phase velocity, it is inferred that this structure is suitable for the desired application. © 2020 IOP Publishing Ltd. All rights reserved.
publisher: Institute of Physics Publishing
date: 2020
type: Conference or Workshop Item
type: PeerReviewed
identifier:   Hanif, M. and Jeoti, V. and Aslam, M.Z.  (2020) FEM simulation analysis of TiO2/ZnO/SiO2/Si multilayer structure for CMOS compatible acousto-optic tunable filter.  In: UNSPECIFIED.     
relation: https://www.scopus.com/inward/record.uri?eid=2-s2.0-85087438070&doi=10.1088%2f1742-6596%2f1529%2f5%2f052039&partnerID=40&md5=0dc172622ef7a56d2328be7050a0b7ed
relation: 10.1088/1742-6596/1529/5/052039
identifier: 10.1088/1742-6596/1529/5/052039