eprintid: 12693
rev_number: 2
eprint_status: archive
userid: 1
dir: disk0/00/01/26/93
datestamp: 2023-11-10 03:27:15
lastmod: 2023-11-10 03:27:15
status_changed: 2023-11-10 01:49:18
type: article
metadata_visibility: show
creators_name: Aslam, M.Z.
creators_name: Jeoti, V.
creators_name: Karuppanan, S.
creators_name: Pandian, M.S.
creators_name: Ferrer, E.M.
creators_name: Suresh, K.
title: Surface acoustic wave modes characteristics of CMOS compatible SiO2/AlN/SiO2/Si multilayer structure with embedded electrodes
ispublished: pub
keywords: Acoustic surface wave devices; CMOS integrated circuits; Silica; Silicon; Temperature, Coupling coefficient; Embedded electrodes; Fabricated device; Finite element simulations; Multilayer structures; Surface acoustic waves; Temperature coefficient of frequencies; Temperature stable, Acoustic waves
note: cited By 4
abstract: In this work, a CMOS compatible surface acoustic wave (SAW) device has been simulated and analyzed on SiO2/AlN/SiO2/Si. The simulation results have been used to characterize a typical fabricated device as well. The phase velocity, coupling coefficient, and temperature coefficient of frequency (TCF) of surface acoustic waves in the proposed structure have been investigated using the finite-element (FE) simulation. The simulation results show that a high velocity and a large effective coupling factor can be simultaneously obtained. Besides, the excellent nearly zero TCF is also achieved. The analysis further shows potential for designing high-frequency SAW devices that are CMOS compatible and temperature stable utilizing the Sezawa wave mode. © 2020 Elsevier B.V.
date: 2020
publisher: Elsevier B.V.
official_url: https://www.scopus.com/inward/record.uri?eid=2-s2.0-85088260385&doi=10.1016%2fj.sna.2020.112202&partnerID=40&md5=b47de403ee17ece178370963e4f8e3ae
id_number: 10.1016/j.sna.2020.112202
full_text_status: none
publication: Sensors and Actuators, A: Physical
volume: 313
refereed: TRUE
issn: 09244247
citation:   Aslam, M.Z. and Jeoti, V. and Karuppanan, S. and Pandian, M.S. and Ferrer, E.M. and Suresh, K.  (2020) Surface acoustic wave modes characteristics of CMOS compatible SiO2/AlN/SiO2/Si multilayer structure with embedded electrodes.  Sensors and Actuators, A: Physical, 313.   ISSN 09244247