<> "The repository administrator has not yet configured an RDF license."^^ . <> . . . "Surface acoustic wave modes characteristics of CMOS compatible SiO2/AlN/SiO2/Si multilayer structure with embedded electrodes"^^ . "In this work, a CMOS compatible surface acoustic wave (SAW) device has been simulated and analyzed on SiO2/AlN/SiO2/Si. The simulation results have been used to characterize a typical fabricated device as well. The phase velocity, coupling coefficient, and temperature coefficient of frequency (TCF) of surface acoustic waves in the proposed structure have been investigated using the finite-element (FE) simulation. The simulation results show that a high velocity and a large effective coupling factor can be simultaneously obtained. Besides, the excellent nearly zero TCF is also achieved. The analysis further shows potential for designing high-frequency SAW devices that are CMOS compatible and temperature stable utilizing the Sezawa wave mode. © 2020 Elsevier B.V."^^ . "2020" . . "313" . . "Elsevier B.V."^^ . . . "Sensors and Actuators, A: Physical"^^ . . . "09244247" . . . . . . . . . . . . . . . . . . . . . . "K."^^ . "Suresh"^^ . "K. Suresh"^^ . . "M.S."^^ . "Pandian"^^ . "M.S. Pandian"^^ . . "M.Z."^^ . "Aslam"^^ . "M.Z. Aslam"^^ . . "E.M."^^ . "Ferrer"^^ . "E.M. Ferrer"^^ . . "S."^^ . "Karuppanan"^^ . "S. Karuppanan"^^ . . "V."^^ . "Jeoti"^^ . "V. Jeoti"^^ . . . . . "HTML Summary of #12693 \n\nSurface acoustic wave modes characteristics of CMOS compatible SiO2/AlN/SiO2/Si multilayer structure with embedded electrodes\n\n" . "text/html" . .