?url_ver=Z39.88-2004&rft_id=10.1016%2Fj.sna.2020.112202&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.aufirst=M.Z.&rft.au=Aslam%2C+M.Z.&rft.aulast=Aslam&rft.volume=313&rft.issn=09244247&rft.atitle=Surface+acoustic+wave+modes+characteristics+of+CMOS+compatible+SiO2%2FAlN%2FSiO2%2FSi+multilayer+structure+with+embedded+electrodes&rft.title=Sensors+and+Actuators%2C+A%3A+Physical&rft.date=2020&rft.genre=article