eprintid: 10137
rev_number: 2
eprint_status: archive
userid: 1
dir: disk0/00/01/01/37
datestamp: 2023-11-09 16:36:46
lastmod: 2023-11-09 16:36:46
status_changed: 2023-11-09 16:30:41
type: conference_item
metadata_visibility: show
creators_name: Setiawan, L.F.
creators_name: Witjaksono, G.
creators_name: Ahmed, A.Y.
title: Modeling and Simulation of Thermally Actuated MEMS Resonators for Gas Sensing Applications
ispublished: pub
keywords: Chemical detection; Chemical sensors; Embedded systems; Gas detectors; Heating equipment; MEMS; Microelectromechanical devices; Models, cantilever; Gas sensing applications; Mathematical modeling and simulation; Micro electromechanical system (MEMS); Micro-cantilevers; Modelling and simulations; simulation; Temperature differences, Resonators
note: cited By 1; Conference of 16th IEEE Student Conference on Research and Development, SCOReD 2018 ; Conference Date: 26 November 2018 Through 28 November 2018; Conference Code:148011
abstract: In this paper, we present the mathematical modeling and simulation of a Micro Electromechanical Systems (MEMS) resonator with an embedded microheater for gas sensing applications using CoventorWare. The microheater is designed to achieve sufficient temperature uniformity to actuate the resonator. Modelling and simulation of the resonator are performed by varying the input voltage of the microheater as well as the width of the supporting beams of the resonator. The theoretical operating temperature of the resonator is found to increase from 325.19 to 714.66 K at different voltages depending on the width variations. On the other hand, simulation results are found to increase from 327.74 to 735.06 K. The theoretical values correspond very well to the simulation values with insignificant average differences for every width variation ranging from 0.44 to 4.43. Results have also shown that temperature across the resonator plate is well-distributed; temperature differences across the plate at input voltage 1.5 V range from 0.0059 K μm to 0.0083 Kμm. The temperature distribution is also symmetrical with percentage differences less than 0.05 from edge to edge of the resonator indicating good temperature uniformity throughout the resonator. © 2018 IEEE.
date: 2018
publisher: Institute of Electrical and Electronics Engineers Inc.
official_url: https://www.scopus.com/inward/record.uri?eid=2-s2.0-85066505910&doi=10.1109%2fSCORED.2018.8710897&partnerID=40&md5=3d15c6b11670567400bc64c6eb6ace81
id_number: 10.1109/SCORED.2018.8710897
full_text_status: none
publication: 2018 IEEE 16th Student Conference on Research and Development, SCOReD 2018
refereed: TRUE
isbn: 9781538691755
citation:   Setiawan, L.F. and Witjaksono, G. and Ahmed, A.Y.  (2018) Modeling and Simulation of Thermally Actuated MEMS Resonators for Gas Sensing Applications.  In: UNSPECIFIED.