This research investigated the structural growth of multiwalled carbon nanotubes (MWCNTs) in a double stage horizontal chemical vapor deposition (CVD) reactor. Ethylene was used as a carbon source for nucleation of nanotubes. Ferrocene catalyst weight was varied from 0.1 to 0.2 g to demonstrate the growth of MWCNTs on Si/SiO2/Al2O3 substrate. The obtained data revealed that the weight of the catalyst significantly affects the diameter, crystallinity, alignment and yield of the nanotubes. Lower inner-shell spacing and the ratio of D-Raman peak intensity and G-Raman peak intensity (ID/IG ratio) were obtained with 0.15 g of ferrocene, which was an indication of relatively pure carbon nanotubes (CNTs) growth. Raman spectra also confirmed the highly crystalline and relatively pure CNTs structures with ID/IG ratio of 0.700. TGA data revealed the formation of 97 pure nanotubes with oxidation temperature of 620°C. However, above and below the optimum (0.15 g of ferrocene), some of the grown CNTs were found defective and few black spots were also seen in TEM micrographs. © 2017 Walter de Gruyter GmbH, Berlin/Boston.