The regeneration of soot filter using microwave heating has several drawbacks, which include non-uniform regeneration, ineffective on very small soot thickness, and could lead to excessive heating, which damages the filter that is loaded with high layer of soot. This paper proposes a novel technique for localized rapid heating and oxidation of any thickness of solid soot, and saving of the consumed microwave energy. This technique was applied by inserting a metal in the accumulated soot, located inside a closed multi-mode microwave cavity, attached to a mono-mode waveguide, connected with a magnetron with a capacity of 2.45 GHz and 800 W. The electric field, generated heat, and temperature variation with time till the attaining of the oxidation temperature of the soot during microwave heating were simulated. The simulation methodology is based on the concept of electromagnetic-thermal energy conversion by coupling Maxwell with heat transfer equations. Finite element method was used with frequency domain for electromagnetic analysis and time domain for thermal analysis. In agreement with experimental results, the predicted microwave heating time to attaining the soot ignition/oxidation temperature was reduced from 8.5 to 0.3 seconds. Based on the presented technique, metallic electrodes can be inserted on the soot filter surfaces as local heating electrodes to enhance the microwave heating of the soot filter regeneration. © 2015 IEEE.