In this work, the hybrid treated layer on austenitic AISI 316L stainless steels were characterized to investigate the improvement on its surface properties. Characterization of this resulting layer was performed by FESEM (Field Emission Scanning Electron Microscope), USPM (Universal Scanning Probe Microscope) and nanoindentation. By using these methods, changes in the mechanical properties due to the diffusion of carbon and nitrogen at low temperature treatments have been traced. This hybrid treated sample has confirmed a considerable increase in hardness and a small rise in the elastic modulus compared to the untreated sample. It is found that all treated samples have enhance E/H ratio which exhibited the decreasing tendency to plastic deformation and reduced the mismatch of properties, while keeping deformation within the elastic range. © Published under licence by IOP Publishing Ltd.