This paper presents the design, modeling and analysis of a new type of electrode structure for the electrets-based energy harvester. A trapezoidal shape of electrodes structure interleaving with one another placed side by side while the electrets layer is placed on the opposite side of the electrodes, are designed, modeled and analyzed to assess its performance. The results of this model are compared to the literatures which will be used as a guideline for constructing the physical device. The analysis provides an insight of the specific parameters that may affect the performance of the energy harvester, hence optimizing the device prior to fabrication. Utilizing the optimized parameters from the simulation, the average output power of the energy harvester is found to be 1 mW with input vibration of 20 Hz frequency and 1 g acceleration. © 2012 IEEE.